Wednesday, June 17, 2009
This system deposits conformal coatings of Parylene N or C. Parylene is applied at room temperature.
- The raw material dimer is vaporized under vacuum and heated to a gas which is pyrolized to cleave the dimer to its monomeric form. In the room temperature deposition chamber, the monomer gas deposits as a transparent polymer film.
- The thickness of coatings can range from the hundreds of angstroms to several tens of micrometers.
- Two chamber sizes accommodate substrates from millimeters across to a maximum of 31cm Dia. X 28cm H)
Applications:
- These polymers are widely used in medical devices and for electronics and automotive application.
- Coatings are biocompatible and biostable and pinhole-free.
- Material provide moisture, chemical and dielectric barriers, as well as low coefficient of friction.
Examples use:
- Back substrate for polymer after delamination from wafer surface.
- Electrical isolation for submerged components
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